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STSetch2 Email Log
Tuesday, November 27, 2012
Re: Shutdown stsetch2 SNF 2012-11-27 14:13:32: User reports high He backside and unstable temp
The wall and top temp cool down, heat up both top and wall temp
back to temp at 150C and 140C. vented chamber and changed
lip seal and re-wiped chamber.
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