Problem stsetch2 SNF 2012-11-27 14:00:36: Something wrong with pressure , temperature and particles

Hi.
Tool condition is wrong.
Pressure and temperature is wrong to previous condition.
Leak cheking pressure
Set point : 25mTorr/min
current value : 189mTorr/min
Platen chiller temperature
previous value : 0 and 37.5C
currnet value : 12 and 35C
When I pulled out my wafer, there was some kind of particles on the back side.