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STSetch2 Email Log
Thursday, November 8, 2012
Problem stsetch2 SNF 2012-11-08 15:42:17: thick wafer fails leak check
I have a a couple of bonded wafer stacks of ~1140 um. They fail the leak check (>200 mTorr/min). The usual 500 um wafer seems OK (~15 mTorr/min)
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