I tried to run O2 clean 10min 5C, but a red allert raised at the start of dep/etch step:
"13.56MHz coil forward power rose above the alarm level."
I clicked 'retry' button next to "PMC1 standard process step" in "operations in fault step" window, but it did not work.
This is the same problem I reported last Saturday.
Mary recommended to shut down the tool.
Best,
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