Monday, May 21, 2012

Problem stsetch2 SNF 2012-05-21 12:01:45: wafer unload very crooked

2 out of 2 wafers have unloaded extremely crooked. doesn't seem to pose any real harm to the wafers, but they definitely can't be put back in the chamber without venting and straightening them. a small issue in light of recent tool problems.

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