Re: Shutdown stsetch2 SNF 2011-07-21 16:51:56: STS2 -- Excessive backside Leak Rate

Changed o-ring under chuck and polished o-ring contact surface. Monitored chamber leak rate after system pump down. Did backside He leak rate after chamber leak rate was below 10 mT/min. He leak rate was 9.5 mT/min and dropping. Should be below 5 mT/min after system has more time to pump out. Jim