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STSetch2 Email Log
Friday, April 22, 2011
Comment stsetch2 SNF 2011-04-22 14:19:28: Update chuck temperature
The indium gasket is here. I want to run an etch rate test before(3 wafers) and after(3 wafers) I install the gasket. Now waiting for Mary or Jim Mc to run the before test.
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