Problem stsetch2 SNF 2011-03-18 17:28:32: Wafer Chuck Not Cooling Properly

Measured wafer chuck temperature with no plasma step after running a 15 min test etch. The wafer temperature using a on-wafer monitor label indicated the chuck temperature was 80C while the chiller in the basement said the coolant temperature was 10C. This explains the wafer temperature problems we have been seeing on the tool. The second chiller is running at 20C so it does not appear that the chillers are hooked up wrong. I will do more tests on Monday to help figure out what is going on.