Comment stsetch2 SNF 2010-12-07 10:09:14: STS2 Process Pressures Have Dropped by Almost 2X

Hi,
For processes with fixed throttle valve positions, the process pressures are now almost half of what they use to be. If this real, it is a sifnificant problem. Etch rates will be down and Sel will be up. I have asked Elmer to look at the problem. The thing to do is to check the process readout calibration. Jim