Re: Shutdown stsetch2 SNF 2010-06-14 08:39:07: Jim RF work

I set the Low Frq Rf duty cycle at 33% (5 ms on and 10ms off).
For SOI processes, you need to remember to check the pulse enble mode box on the 380KHz setup page in your recipe. If you do not check this box, you will get poor resist selectivity.
Jim