Monday, May 24, 2010

Re: Shutdown stsetch2 SNF 2010-05-10 22:38:41: tool marked as "Down-Maint"

Replaced a tuning capacitors in the matching network. Ran the KY ver2 recipe (15 min etch) six times so far. The zero power drop-out with the first run, 4th, 5th and 6th. One drop-out the with each of the 2nd and 3rd runs.

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