-Found Coil generator in fault state
-Turned generator off and on
-In STS control panel, reset generator in manual mode.
- Checked all rf connections on at the top of chamber coming out of the matching box. No problems found.
- Ran Jim-Test-Etch for 16min for 2 runs.
-- In 1st run found one cycle where matching did not keep up.
-- In 2nd run matching was fine throught the run.
- Checked generator during 2nd run and found warning light on.
Jim
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