I tried running a wafer (another one from prev. same batch) using same previous recipe. Plasma lit, but just a few cycles in alarm fault occurred and process was stopped. "13.56 MHz coil forward power fell below alarm level setpoint was 0W; alarm band setpoint was 500W, value reached was 1407W." Tried re-running (did not remove wafer from chamber) and got same fault after just a cycle again. Value reached was 866W second time. (FYI. Wafer ID: S025509, backside coolant presure 10T, flow 16.6sccm)
Didn't try anymore with STS2. It was late and was only running the wafer while I pondered what raindance would make p5000's blade give me back my good wafer.
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