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STSetch2 Email Log
Tuesday, October 20, 2009
Re: Shutdown stsetch2 SNF 2009-10-18 23:56:06: Coil matching problem
Replaced the coil chiller. Water resistivity ~ 1 Mohm. Ran Smooth-Shallow Template recipe. Plasma flickered once during each dep /etch cycle for about 1-2 sec.
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