Friday, October 23, 2009
Re: Problem stsetch2 SNF 2009-10-12 20:50:30: plasma NOT stable
Jim Mc. adjusted the matching network. Ran the Smooth-Shallow recipe with no plasma blink. Ran the Kevin-SOI recipe. Initially plasma blinked 3X at the start of the process. After adjusting the coil tune presets from 42/36 to 50/36, the plasma blinking was eliminated.
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment