Friday, October 23, 2009
Re: Comment stsetch2 SNF 2009-10-02 15:55:33: Need process qualification
Jim Mc. adjusted the matching network. Ran the Smooth-Shallow recipe with no plasma blink. Ran the Kevin-SOI recipe. Initially plasma blinked 3X at the start of the process. After adjusting the coil tune presets from 42/36 to 50/36, the plasma blinking was eliminated.
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