Tested system using "Smooth Shallow Template". Problem with coil match when switching from etch to dep.
Put match to manual, found match spot for optimum for dep cycle (41%,57%) and ran test. Plasma was stable (did not flicker) but 350W reflective during etch. Then tried to find optimum etch tune point. But plasma always flicker with any change in % between cycle (even 2%).
Suspect possible arcing or bushing problem in air caps because any movement in coil match causes flicker. Recommend checking the coil
matching network air caps. Did all the test with Eric's help.
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