Most of the chamber parts have been replaced and reassemble. System is under vacuum. The heaters have been turned on. The last leak up rate = 38 mT/min.
One of the electrode's thermal gaskets was damaged during disassembly and a replacement part is 3 -5 weeks away. We ordered a new gasket but in the mean time, we will reuse the old gasket . We will verify the electrode's temperature and thermal uniformity meets STS specifications.
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