Completed the upper chamber PM. Chamber leak rate is about as it was before the PM (10 mT/min). Backside He leak rate is a little high at 18 sccm (normally its around 10 sccm) even after replacing the lip seal oring.
System should be OK to run for non-critical processes. Please read Jim Mcvittie's emails for a more detailed account of the PM.
Friday, July 31, 2009
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment