Chamber leak rate ~ 10 mT/min - Need to replace the magnetic confinement o-ring and rebuild the lower electrode. Field service will be available on Aug 17th.
Backside He cooling flow rate is also a little high at 18 sccm. The flow is normally around 10 sccm and the shutdown limit is 25 sccm.
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment