Replaced 3 plastic bulkhead clamps with aluminum ones. The plastic KF clamps were burnt and deformed by the chamber heat. Leak rate however was still about 10 mT/min. Found leaks in the coil area and the bottom electrode. Unable to pin point either leaks because of obstructions. I will disassemble the coil assembly again to check the sealing surfaces (all o-ring in the coil assembly have been replaced).
As far as the bottom electrode leak, we will need to discuss bringing in field service to rebuild the electrode assembly.
Note: The leak rate was about 10 mT/ min before the PM started.
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