red alarm:
system can not stabilize to recipe set points after 5:00 min
yellow alarm:
BSG pressure controller
BSG pressure controller pressure fell below the warning level specified in tolerance recipe
The setpoint was 10000 mTorr, the warning band below setpoint was 9000 mTorr, the value reached was 87.9
Yesterday night, another user told me he couldn't process his wafers.
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