Inspected inside of chamber:
Outside sealing Viton oring found to be flaking, particles shed onto chuck
Base chamber pressure with turbopump on was 6mT (should be <0mT) --- this level of chamber leak likely part of process shifting observed on tool as well as resist burning/cracking
Ceramic inside chamber noted as dirty, needs to be cleaned for usage, ceramic nees to be removed for cleaning at Pentagon
Noted a hot spot on ceramic near upper part of ceramic
Inner o-rings are also Viton which need to be replaced during PM
Current pumping cannot attain less than 1.2Torr on chamber, turbopump cannot cross-over at this pressure
PM kit required to return tool to process usage, baseline ASE tests need to be perfomed after PM
STS - Steve Vargo
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