Thursday, April 2, 2009
Problem stsetch2 SNF 2009-04-02 22:09:19: red error
When I enabled the system this afternoon, red error light was on, the error had something to do with being unable to transfer wafers due to the loadlock being open. Loadlock was closed, looked inside chamber, didn't seem to be a wafer there, but I didn't want to take any chances. Didn't run any process.
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