Problem stsetch2 SNF 2009-02-17 19:25:15: System non-responsive

The system will not allow me to vent, map carousel, etc. I had a wafer handling fault that I was able to clear by aborting the batch. After I removed my wafers, the machine still indicated that a wafer was present. I tried to manually remove the wafer, but the machine faulted when it did not sense a wafer in the carrier.