Wednesday, January 28, 2009
Re: Problem stsetch2 SNF 2009-01-28 13:04:27: Leak Test Failure
The first 7um resist wafer I tried failed a couple of times. Ran a bare Si with no problem. I did a little cleaning of a 7um resist wafer and it is running. It seems like the problem for my wafers came from resist at the very edge of the wafer.
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