Adjusted the arm @ chamber sensor position. Now arm does not error when going into the chamber.
Load lock still only pumps down to 3 torr. The leak appears to be in the pump line between the roughing valve and the pump. An external tc gauge reads about 25 mT at the pump but about 3 torr at the pump side of the LL roughing valve.
Another problem is the wafer lift times out when going to the down position.
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