Problem stsetch2 SNF 2008-03-23 15:15:26: 13.56 MHz coil cannot reach set point

13.56 MHz coil cannot reach set point.
I run zubin- O2 clean receipe and cannot strike plasma, the real power is below 10% of the set point power.
I run zubin smooth shallow and get plasma but the power for the 13.56MHz coil is still much lower (<10%) than set point.