Thursday, January 31, 2008

Problem stsetch2 SNF 2008-01-31 16:11:56: ****DO NOT USE****** My wafer fell off the chuck and resides in chamber

Unfortunately my device wafer was dropped during the transfer. I can see it inside the chamber and it doesn't look like it has been damaged. This is one of my device wafers and unfortunately I do not have time to stick around to rescue it. I did not shut down the tool because there is a chance that someone may be able to pump the system down and successful recover my wafer. I am off to Reno and will be back next week. If my wafer can be saved and placed in a safe spot until I return I will be much abliged! THANK YOU - THANK YOU - THANK YOU!!!

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